Radiant's foundry makes it easy for researchers to integrate thin film lead zirconate titanate (PZT) based piezoMEMS into their project. Whether you have your own fabrication capabilities and need global platinum electrodes and PZT films to build on, you want a complete packaged device you can plug into your system, or something in between.

We produce our own PZT sol-gels. This gives us control over our supply and increases the range of compositions, doping, and interfacial layers we can deposit. Our patterning is done by contact aligner, which keeps mask costs low. We are able to independently pattern PZT, top and bottom electrodes increasing the flexibility of designs. Our robust design rules ensure new designs will yield well on the first lot. Optional bond pads allow devices to be soldered or wire bonded into packages and optional oxide passivation can improve the long term reliability of devices installed in systems or placed in the field. Our process is also adaptable. We will work with you to integrate our capacitors into your process, or integrate your unique material/structure with our piezoMEMS platform and produce devices tailored to your application. A library of material property coefficients is available to support simulation of the targeted devices prior to fabrication.